High electron density $\beta -(A{l}_{0.18}G{a}_{0.82}{)}_2{O}_3/G{a}_2{O}_3$ modulation doping using ultra-thin (1 nm) spacer layer

Nidhin Kurian Kalarickal, Zhanbo Xia, Joe Mcglone +5

We report on the design and demonstration of $\beta -(A{l}_{0.18}G{a}_{0.82}{)}_2{O}_3/G{a}_2{O}_3$ modulation doped heterostructures to achieve high sheet charge density. The use of a thin spacer…