Correlating the nanostructure of Al-oxide with deposition conditions and dielectric contributions of two-level systems in perspective of superconducting quantum circuits

S. Fritz, A. Seiler, L. Radtke +4

This work is concerned with Al/Al-oxide(AlO${}_x$)/Al-layer systems which are important for Josephson-junction-based superconducting devices such as quantum bits. The device perfor…