activity
20142025
most citedThe effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges

98 citations · 277 across the 13 of their papers we have counts for

collaborators
Showing 2022Show all

1 paper · 1 filter

physics.plasm-ph2022★ 21 cited

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode

Denis Eremin, Dennis Engel, Dennis Krüger +9

The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investi…