most citedDiagnostics of low-pressure hydrogen discharge created in a 13.56 MHz RF plasma reactor

11 citations · 11 across the 1 of their papers we have counts for

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physics.plasm-ph2019★ 11 cited

Diagnostics of low-pressure hydrogen discharge created in a 13.56 MHz RF plasma reactor

J Krištof, A Annušová, M Anguš +5

A 13.56 MHz RF discharge in hydrogen was studied within the pressure range of 1-17 10 Pa, and at power range of 400-1000 W. The electron energy distribution function and 18 electro…