most citedTailored Molybdenum Carbide Properties and Graphitic Nano Layer Formation by Plasma and Ion Energy Control during Plasma Enhanced ALD

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physics.app-ph2019★ 3 cited

Tailored Molybdenum Carbide Properties and Graphitic Nano Layer Formation by Plasma and Ion Energy Control during Plasma Enhanced ALD

Eldad Grady, Marcel Verheijen, Tahsin Faraz +3

We demonstrate the extensive study on how film density and crystallinity of molybdenum carbide () can be tailored during plasma-enhanced ALD (PEALD) by controlling either…