Fabrication of micro fluidic cavities using Si-to-glass anodic bonding

N. Zhelev, T. S. Abhilash, R. G. Bennett +7

We demonstrate the fabrication of $\sim$1.08 $\mu$m deep microfluidic cavities with characteristic size as large as 7 mm $\times$ 11 mm or 11 mm diameter, using a silicon$-$glass ano…