On the Homogeneity of TiN Kinetic Inductance Detectors Produced through Atomic Layer Deposition

Israel Hernandez, Martin Makler, Juan Estrada +5

The non-homogeneity in the critical temperature $T_c$ of an Microwave Kinetic Inductance Detector (MKID) could be caused by non-uniformity in the deposition process of the thin s…