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cond-mat.mtrl-sci2025★ 13 cited
Low-to-mid Al content ( 0-0.56) AlInN layers deposited on Si(100) by radio-frequency sputtering
R. Blasco, S. Valdueza-Felip, D. Montero +3
Radio-frequency (RF) sputtering is a low-cost technique for the deposition of large-area single-phase AlInN on silicon layers with application in photovoltaic devices. Here, the ef…
cond-mat.mtrl-sci2021★ 4 cited
Comparison of the material quality of AlxIn1-xN (x ~ 0-0.50) films deposited on Si (100) and (111) by reactive RF sputtering
M. Sun, R. Blasco, M. de la Mata +5
Here, we compare the material quality of AlxIn1-xN layers deposited on Si with different crystallographic orientations, (100) and (111), via radio-frequency (RF) sputtering. To mod…