2 papers
cond-mat.mtrl-sci2021
Thermal and Oxidation Stability of TiW Diffusion Barriers Investigated by Soft and Hard X-ray Photoelectron Spectroscopy
Curran Kalha, Sebastian Bichelmaier, Nathalie K. Fernando +10
The binary alloy of titanium-tungsten (TiW) is an established diffusion barrier in high-power semiconductor devices, owing to its ability to suppress the diffusion of copper from t…
cond-mat.mtrl-sci2019
Effects of nitridation on SiC/SiO structures studied by hard X-ray photoelectron spectroscopy
Judith Berens, Sebastian Bichelmaier, Nathalie K. Fernando +11
SiC is set to enable a new era in power electronics impacting a wide range of energy technologies, from electric vehicles to renewable energy. Its physical characteristics outperfo…