167 citations · 309 across the 3 of their papers we have counts for
3 papers
Fabrication of superconducting through-silicon vias
Justin L. Mallek, Donna-Ruth W. Yost, Danna Rosenberg +15
Increasing circuit complexity within quantum systems based on superconducting qubits necessitates high connectivity while retaining qubit coherence. Classical micro-electronic syst…
Solid-state qubits integrated with superconducting through-silicon vias
Donna-Ruth W. Yost, Mollie E. Schwartz, Justin Mallek +14
As superconducting qubit circuits become more complex, addressing a large array of qubits becomes a challenging engineering problem. Dense arrays of qubits benefit from, and may re…
Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators
Greg Calusine, Alexander Melville, Wayne Woods +12
Improving the performance of superconducting qubits and resonators generally results from a combination of materials and fabrication process improvements and design modifications t…