most citedP-type -doping with Diborane on Si(001) for STM Based Dopant Device Fabrication

49 citations · 49 across the 1 of their papers we have counts for

collaborators

1 paper

cond-mat.mes-hall2019★ 49 cited

P-type -doping with Diborane on Si(001) for STM Based Dopant Device Fabrication

Tomáš Škereň, Sigrun Köster, Bastien Douhard +2

Hydrogen resist lithography using the tip of a scanning tunneling microscope (STM) is employed for patterning p-type nanostructures in silicon. For this, the carrier density and mo…