2 papers
cond-mat.mtrl-sci2000
High Reverse Breakdown A-C:H/Si Diodes Manufactured by rf-Pecvd
Paul Shashi, F. J. Clough
Thin films of hydrogenated amorphous carbon (a-C:H) deposited by radio frequency plasma-enhanced chemical vapour deposition (rf-PECVD) have been studied for various applications. A…
cond-mat.mtrl-sci2000
Substrate Sensitivity of the Adhesion and Material Properties of RF-Pecvd Amorphous Carbon
S. Paul, F. J Clough
Hydrogenated amorphous carbon (a-C:H), deposited by the rf-plasma enhanced chemical vapour deposition (rf-PECVD) technique, is a promising material for large area electronic and in…