2 papers
cond-mat.mes-hall2020
Giant enhancement in the thermal responsivity of microelectromechanical resonators by internal mode coupling
Ya Zhang, Ryoka Kondo, Boqi Qiu +2
We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. Th…
physics.app-ph2019
Enhanced thermal sensitivity of MEMS bolometers integrated with two-dimensional phononic crystals
Ya Zhang, Boqi Qiu, Naomi Nagai +3
We have fabricated two-dimensional phononic crystal (PnC) structures on GaAs doubly-clamped microelectromechanical system (MEMS) beam resonators to modulate their thermal propertie…