72 citations · 136 across the 6 of their papers we have counts for
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physics.app-ph2024★ 1 cited
Significant tuning of dispersive mode coupling in doubly clamped MEMS beam resonators using thermally induced buckling effect
Chao Li, Qian Liu, Kohei Uchida +3
Dispersive mode coupling is a promising mechanism for the development of advanced micro/nanoelectromechanical devices. However, strong coupling strength remains a key challenge lim…
physics.app-ph2019★ 15 cited
Enhanced thermal sensitivity of MEMS bolometers integrated with two-dimensional phononic crystals
Ya Zhang, Boqi Qiu, Naomi Nagai +3
We have fabricated two-dimensional phononic crystal (PnC) structures on GaAs doubly-clamped microelectromechanical system (MEMS) beam resonators to modulate their thermal propertie…