2 papers
physics.app-ph2020
A Study of Selectively Digital Etching Silicon-Germanium with Nitric and Hydrofluoric Acids
Chen Li, Huilong Zhu, Yongkui Zhang +13
A digital etching method was proposed to achieve excellent control of etching depth. The digital etching characteristics of p+ Si and Si0.7Ge0.3 using the combinations of HNO3 oxid…
physics.ins-det2019
Characterization of the first prototype CMOS pixel sensor developed for the CEPC vertex detector
L. J. Chen, H. B. Zhu, X. C. Ai +14
Purpose: CMOS pixel sensors have become extremely attractive for future high performance tracking devices. Initial R\&D work has been conducted for the vertex detector for the prop…