2 papers
eess.SP2023
Exploring the Potential of Integrated Optical Sensing and Communication (IOSAC) Systems with Si Waveguides for Future Networks
Xiangpeng Ou, Ying Qiu, Ming Luo +17
Advanced silicon photonic technologies enable integrated optical sensing and communication (IOSAC) in real time for the emerging application requirements of simultaneous sensing an…
physics.app-ph2020
A Study of Selectively Digital Etching Silicon-Germanium with Nitric and Hydrofluoric Acids
Chen Li, Huilong Zhu, Yongkui Zhang +13
A digital etching method was proposed to achieve excellent control of etching depth. The digital etching characteristics of p+ Si and Si0.7Ge0.3 using the combinations of HNO3 oxid…