2 papers
physics.app-ph2020
A Study of Selectively Digital Etching Silicon-Germanium with Nitric and Hydrofluoric Acids
Chen Li, Huilong Zhu, Yongkui Zhang +13
A digital etching method was proposed to achieve excellent control of etching depth. The digital etching characteristics of p+ Si and Si0.7Ge0.3 using the combinations of HNO3 oxid…
cs.ET2020
The Investigation of Negative Capacitance Vertical Nanowire FETs Based on SPICE Model at Device-Circuit Level
Weixing Huang, Huilong Zhu, Kunpeng Jia +4
In this study, a SPICE model for negative capacitance vertical nanowire field-effect-transistor (NC VNW-FET) based on BSIM-CMG model and Landau-Khalatnikov (LK) equation was presen…