1 citations · 1 across the 1 of their papers we have counts for
2 papers
physics.optics2021★ 1 cited
Dynamic MEMS-based optical metasurfaces
Chao Meng, Paul C. V. Thrane, Fei Ding +5
Optical metasurfaces (OMSs) have shown unprecedented capabilities for versatile wavefront manipulations at the subwavelength scale, thus opening fascinating perspectives for next g…
physics.app-ph2020
Towards High Throughput Large Area Metalens Fabrication using UV-Nanoimprint lithography and Bosch Deep Reactive Ion Etching
Christopher A. Dirdal, Geir Uri Jensen, Hallvard Angelskår +3
We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by use of standard industrial high throughput silicon processing techniques: UV Nano Imp…