2 papers
physics.optics2021
Study of waveguide background at visible wavelengths for on-chip nanoscopy
David A. Coucheron, Øystien I. Helle, James S. Wilkinson +4
On-chip super-resolution optical microscopy is an emerging field relying on waveguide excitation with visible light. Here, we investigate two commonly used high-refractive index wa…
physics.app-ph2020
Towards High Throughput Large Area Metalens Fabrication using UV-Nanoimprint lithography and Bosch Deep Reactive Ion Etching
Christopher A. Dirdal, Geir Uri Jensen, Hallvard Angelskår +3
We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by use of standard industrial high throughput silicon processing techniques: UV Nano Imp…