Molecular Dynamics Simulation of Vacancy Cluster Formation in β- and α-$S{i}_3{N}_4$

E. Adabifiroozjaei, S. S. Mofarah, H. Ma +3

Molecular dynamics simulation is used to study vacancy cluster formation in $\beta$- and $\alpha$-$S{i}_3{N}_4$ with varying vacancy contents (0 - 25.6 at%). Vacancies are randomly created in s…