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cond-mat.mtrl-sci2026
Maskless Electron Beam-Induced Etching of Diamond in Air: A Secondary Electron-Driven Mechanism
Duc-Duy Tran, Cedric Mannequin, Fabrice Donatini +2
We report a direct, maskless electron beam-induced etching (EBIE) process for diamond in air, enabling high-precision patterning without lithography or plasma processing. Through a…
cond-mat.mtrl-sci2026
First Plasma Atomic Layer Etching of Diamond via O/Kr Chemistry
Duc Duy Tran, Cedric Mannequin, Aboulaye Traore +2
We report the first plasma atomic layer etching (ALE) process for diamond using a cyclic plasma sequence composed of two separated steps: oxygen surface modification and krypton io…