Tailoring the properties of YBa${}_2$Cu${}_3$O${}_{7-\delta }$ thin films by 30 keV He${}^{+}$ irradiation: An enabling route to superconducting device nanopatterning

Bernd Aichner, Simon Koch, Philipp A. Korner +8

Focused helium ion beam (He-FIB) irradiation with 30 keV ions is a key tool for nanoscale patterning and defect engineering in high transition temperature (Tc) cuprate superconduct…