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20132026
most citedProbing low noise at the MOS interface with a spin-orbit qubit

112 citations · 552 across the 15 of their papers we have counts for

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physics.plasm-ph2013★ 15 cited

Inductively Coupled Plasma etching of amorphous silicon nanostructures over nanotopography using C4F8/SF6 chemistry

Patrick Harvey-Collard, Abdelatif Jaouad, Dominique Drouin +1

Inductively Coupled Plasma (ICP) etching of amorphous silicon (a-Si) nanostructures using a continuous C4F8/SF6 plasma over nanotopography in silicon dioxide (SiO2) is investigated…