20 citations · 32 across the 2 of their papers we have counts for
2 papers
physics.app-ph2020★ 20 cited
Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures
Philipp Hönicke, Anna Andrle, Yves Kayser +6
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor…
physics.comp-ph2019★ 12 cited
A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluorescence
K. V. Nikolaev, V. Soltwisch, P. Hoenicke +6
Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parame…