27 citations · 64 across the 5 of their papers we have counts for
5 papers
Grazing incidence X-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
Anna Andrle, Philipp Hönicke, Philipp Schneider +6
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Usi…
Time-frequency analysis assisted reconstruction of ruthenium optical constants in the sub-EUV spectral range 8nm-23.75nm
Qais Saadeh, Philipp Naujok, Vicky Philipsen +9
The optical constants of ruthenium in the spectral range 8 nm to 23.75 nm with their corresponding uncertainties are derived from the reflectance of a sputtered ruthenium thin film…
Shape- and element-sensitive reconstruction of periodic nanostructures with grazing incidence X-ray fluorescence analysis and machine learning
Anna Andrle, Philipp Hönicke, Grzegorz Gwalt +4
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic…
Invertible Neural Networks versus MCMC for Posterior Reconstruction in Grazing Incidence X-Ray Fluorescence
Anna Andrle, Nando Farchmin, Paul Hagemann +3
Grazing incidence X-ray fluorescence is a non-destructive technique for analyzing the geometry and compositional parameters of nanostructures appearing e.g. in computer chips. In t…
Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures
Philipp Hönicke, Anna Andrle, Yves Kayser +6
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor…