170 citations · 648 across the 16 of their papers we have counts for
1 paper · 2 filters
Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger +3
The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to impro…