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cond-mat.mtrl-sci2001
Quantitative Comparison between AES and SIMS Depth Profiles of a Double Layer Structure of AlAs in GaAs Using the MRI-model
S. Hofmann, A. Rar, D. W. Moon +1
Application of the so called mxing-roughness-information depth (MRI)-model to the quantitative reconstruction of the in-depth distribution of composition is demonstrated by compari…
cond-mat.mtrl-sci2000
Ultimate Depth Resolution and Profile Reconstruction in Sputter Profiling with AES and SIMS
S. Hofmann
New developments in quantitative sputter depth profiling during the past ten years are reviewed, with special emphasis on the experimental achievement of ultrahigh depth resolution…
cond-mat.mtrl-sci1998
Applications of the MRI-model in sputter depth profiling
Siegfried Hofmann
The physical principles of the MRI model (abbreviation for mixing-roughness- information depth) for the theoretical calculation of measured concentration- depth profiles obtained i…