Unusually high-density 2D electron gases in N-polar AlGaN/GaN heterostructures with GaN/AlN superlattice back barriers grown on sapphire substrates

Maciej Matys, Atsushi Yamada, Toshihiro Ohki

We reported on the observation of extremely high-density ($>10^{14}$cm${}^{-2}$) 2D electron gas in N-polar AlGaN/GaN heterostructures grown on sapphire substrates. Due to introducin…