Influence of Different Surface Morphologies on the Performance of High Voltage, Low Resistance Diamond Schottky Diodes

Philipp Reinke, Fouad Benkhelifa, Lutz Kirste +6

Vertical diamond Schottky diodes with blocking voltages $V_{\text{BD}}>2.4\text{ kV}$ and on-resistances $R_{\text{On}}<400\text{ m}\Omega {\text{cm}}^2$ were fabricated on homoepi…