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physics.app-ph2021★ 1 cited
Reactor scale simulations of ALD and ALE: ideal and non-ideal self-limited processes in a cylindrical and a 300 mm wafer cross-flow reactor
Angel Yanguas-Gil, Joseph A. Libera, Jeffrey W. Elam
We have developed a simulation tool to model self-limited processes such as atomic layer deposition and atomic layer etching inside reactors of arbitrary geometry. In this work, we…
cond-mat.mtrl-sci2021
Ionic conductivity optimization of composite polymer electrolytes through filler particle chemical modification
Andres Villa, Juan Carlos Verduzco, Joseph A. Libera +1
The addition of filler particles to polymer electrolytes is known to increment their ionic conductivity (IC). A detailed understanding of how the interactions between the constitue…