2 papers
cond-mat.mtrl-sci2025
LPCVD Grown Si-Doped -GaO Films with Promising Electron Mobilities
Saleh Ahmed Khan, Ahmed Ibreljic, Stephen Margiotta +1
We systematically investigated the growth of Si-doped -GaO films using LPCVD system, achieving high electron mobilities of 162 cm/V.s and 149 cm/V.s at carrier…
cond-mat.mtrl-sci2025
Metalorganic Chemical Vapor Deposition of \b{eta}-(AlxGa1-x)2O3 thin films on (001) \b{eta}-Ga2O3 substrates
A. F. M. Anhar Uddin Bhuiyan, Lingyu Meng, Hsien-Lien Huang +5
Phase pure \b{eta}-(AlxGa1-x)2O3 thin films are grown on (001) oriented \b{eta}-Ga2O3 substrates via metalorganic chemical vapor deposition (MOCVD). By systematically tuning the pr…