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cond-mat.mtrl-sci2015★ 4 cited
Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode
Rostislav V. Lapshin
A method is described intended for distributed calibration of a probe microscope scanner consisting in a search for a net of local calibration coefficients (LCCs) in the process of…
cond-mat.mtrl-sci2015★ 9 cited
Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Virtual mode
Rostislav V. Lapshin
A method of distributed calibration of a probe microscope scanner is suggested which main idea consists in a search for a net of local calibration coefficients (LCCs) in the proces…
cond-mat.mtrl-sci2015★ 8 cited
Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Approach description
Rostislav V. Lapshin
A method is described intended for distributed calibration of a probe microscope scanner consisting in a search for a net of local calibration coefficients (LCCs) in the process of…