24 citations · 24 across the 2 of their papers we have counts for
2 papers
physics.app-ph2023
Coherent Fourier Scatterometry for detection of killer defects on silicon carbide samples
Jila Rafighdoost, Dmytro Kolenov, Silvania F. Pereira
It has been a widely growing interest in using silicon carbide (SiC)in high-power electronic devices. Yet, SiC wafers may contain killer defects that could reduce fabrication yield…
physics.optics2020★ 24 cited
Machine learning techniques applied for detection of nanoparticles on surfaces using Coherent Fourier Scatterometry
D. Kolenov, S. F. Pereira
We present an efficient machine learning framework for detection and classification of nanoparticles on surfaces that are detected in the far-field with Coherent Fourier Scatterome…