\b{eta}-phase (AlxGa1-x)2O3 thin film with Al composition more than 70%

Che-Hao Liao, Kuang-Hui Li, C. G. Torres. Castanedo +2

In this work, we have demonstrated wide-composition-range \b{eta}-(AlxGa1-x)2O3 thin films with record-high Al compositions up to 77% for \b{eta}-(AlxGa1-x)2O3 covering bandgaps fr…