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20122020
most citedReduction of residual stress in AlN thin Films synthesized by magnetron sputtering technique

50 citations · 91 across the 6 of their papers we have counts for

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cond-mat.mtrl-sci2017

Spectroscopic Ellipsometry investigation on anisotropic optical properties of sputtered AlN films

Padmalochan Panda, R. Ramaseshan, S. Tripura Sundari +1

We report the uniaxial anisotropic optical constants of Wurtzite type AlN films deposited on Si (100) substrate using DC reactive magnetron sputtering as a function of growth tempe…