activity
20122020
most citedReduction of residual stress in AlN thin Films synthesized by magnetron sputtering technique

50 citations · 91 across the 6 of their papers we have counts for

collaborators
Showing cond-mat.mtrl-sciShow all

6 papers · 1 filter

cond-mat.mtrl-sci2020★ 38 cited

Structural, optical and mechanical properties of Y2Ti2O7 single crystal

M. Suganya, K. Ganesan, P. Vijayakumar +3

We report on the growth of Y2Ti2O7 single crystals by optical floating zone technique. X-ray diffraction and Raman spectroscopy studies confirm the structural quality of the crysta…

cond-mat.mtrl-sci2017

Spectroscopic Ellipsometry investigation on anisotropic optical properties of sputtered AlN films

Padmalochan Panda, R. Ramaseshan, S. Tripura Sundari +1

We report the uniaxial anisotropic optical constants of Wurtzite type AlN films deposited on Si (100) substrate using DC reactive magnetron sputtering as a function of growth tempe…

cond-mat.mtrl-sci2015★ 50 cited

Reduction of residual stress in AlN thin Films synthesized by magnetron sputtering technique

Padmalochan Panda, R. Ramaseshan, N Ravi +5

We report the reduction in residual stress of AlN thin films and also the crystal structure, surface morphology and nanomechanical properties of magnetron sputtered as a function o…

cond-mat.mtrl-sci2014

Preferentially orientated E-beam TiN thin films using focused jet of nitrogen gas

R. Ramaseshan, Feby Jose, S. Rajagopalan +1

A modified electron beam evaporator has been used judiciously to synthesize TiN thin films with (111) preferred orientation. This new design involved in creating local plasma by ac…

cond-mat.mtrl-sci2013★ 3 cited

Temperature dependence of dielectric constants in Titanium Nitride

S. Tripura Sundari, R. Ramaseshan, Feby Jose +2

The temperature dependence of optical constants of titanium nitride thin film is investigated using spectroscopic ellipsometry between 1.4 to 5 eV in the temperature range 300 K to…

cond-mat.mtrl-sci2012

Optical properties and hardness of highly a-axis oriented AlN films

Feby Jose, R. Ramaseshan, S. Tripura Sundari +4

This paper reports optical and nanomechanical properties of seldom studied highly a-axis oriented AlN thin films for the first time. These films were deposited by reactive DC magne…