5 citations · 5 across the 3 of their papers we have counts for
3 papers
Precision Specimen Positioning in Electron Microscopy through Hysteresis Compensation, Iterative Learning, and Vision-Based Sensing
J. S. van Hulst, A. M. C. de Peffer, D. Herceg +4
Electron microscopy requires nanometer-scale specimen positioning over a long stroke. Piezo-stepper actuators are well suited for this task, but their accuracy is limited by hyster…
Compensating Hysteresis and Mechanical Misalignment in Piezo-Stepper Actuators
Max van Meer, Tim van Meijel, Emile van Halsema +3
Piezo-stepper actuators enable accurate positioning through the sequential contraction and expansion of piezoelectric elements, generating a walking motion. The aim of this paper i…
Commutation-Angle Iterative Learning Control for Intermittent Data: Enhancing Piezo-Stepper Actuator Waveforms
Leontine Aarnoudse, Nard Strijbosch, Edwin Verschueren +1
Piezo-stepper actuators are used in many nanopositioning systems due to their high resolution, high stiffness, fast response, and the ability to position a mover over an infinite s…