Application a-Si:H and Its Alloys for Photoreceptor Devices

Darsikin, D. M. Jasruddin, H. Saragih +4

Photoreceptor devices have been fabricated for positive corona with multi-layer structure of glass/ZnO /i-a-SiC:H /i-a-Si:H /p-a-SiC:H /Al type by using dual chamber plasma enhance…