most citedReference-free evaluation of thin films mass thickness and composition through energy dispersive x-ray spectroscopy

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physics.plasm-ph2020

Integrated quantitative PIXE analysis and EDX spectroscopy using a laser-driven particle source

F. Mirani, A. Maffini, F. Casamichiela +17

Among the existing elemental characterization techniques, Particle Induced X-ray Emission (PIXE) and Energy Dispersive X-ray (EDX) spectroscopy are two of the most widely used in d…