Haozhe Wang

activity

20162026

most citedChalcogenide Glass-on-Graphene Photonics

259 citations · 587 across the 14 of their papers we have counts for

collaborators

Showing 2022Show all

2 papers · 1 filter

cond-mat.mes-hall2022

Isotropic plasma-thermal atomic layer etching of aluminum nitride using SF $_{6}$ plasma and Al(CH $_{3}$ ) $_{3}$

Haozhe Wang, Azmain Hossain, David Catherall +1

We report the isotropic plasma atomic layer etching (ALE) of aluminum nitride using sequential exposures of SF $_{6}$ plasma and trimethylaluminum (Al(CH $_{3}$ ) $_{3}$ , TMA). ALE was obser…

physics.app-ph2022★ 1 cited

Multiplication of freestanding semiconductor membranes from a single wafer by advanced remote epitaxy

Hyunseok Kim, Yunpeng Liu, Kuangye Lu +26

Freestanding single-crystalline membranes are an important building block for functional electronics. Especially, compounds semiconductor membranes such as III-N and III-V offer gr…

Isotropic plasma-thermal atomic layer etching of aluminum nitride using SF6​ plasma and Al(CH3​)3​

Multiplication of freestanding semiconductor membranes from a single wafer by advanced remote epitaxy

Isotropic plasma-thermal atomic layer etching of aluminum nitride using SF $_{6}$ plasma and Al(CH $_{3}$ ) $_{3}$