Showing 2018Show all
2 papers · 1 filter
cond-mat.mtrl-sci2018
Synthesis and systematic optical investigation of selective area droplet epitaxy of InAs/InP quantum dots assisted by block copolymer lithography
Artem Shikin, Elizaveta Lebedkina, Czcibor Ciostek +6
We report on the systematic investigation of the optical properties of a selectively grown quantum dot gain material assisted by block-copolymer lithography for potential applicati…
physics.app-ph2018
Comparison of processing-induced deformations of InP bonded to Si determined by e-beam metrology: direct vs. adhesive bonding
Aurimas Sakanas, Elizaveta Semenova, Luisa Ottaviano +2
In this paper, we employ an electron beam writer as metrology tool to investigate distortion of an exposed pattern of alignment marks in heterogeneously bonded InP on silicon. Afte…