collaborators

1 paper

cond-mat.mes-hall2025

Overlay-aware Variation Study of Flip FET and Benchmark with CFET

Wanyue Peng, Haoran Lu, Jingru Jiang +5

In this work, we carried out an overlay-aware variation study on Flip FET (FFET) considering the impact on RC parasitics induced by the lithography misalignment in backside process…