23 citations · 55 across the 9 of their papers we have counts for
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physics.app-ph2022★ 9 cited
Nanomechanical Design Strategy for Single-Mode Optomechanical Measurement
Giada La Gala, John P. Mathew, Pascal Neveu +1
The motion of a mechanical resonator is intrinsically decomposed over a collection of normal modes of vibration. When the resonator is used as a sensor, its multimode nature often…
physics.app-ph2021★ 4 cited
Calibration-based overlay sensing with minimal-footprint targets
Tom A. W. Wolterink, Robin D. Buijs, Giampiero Gerini +2
Overlay measurements are a critical part of modern semiconductor fabrication, but overlay targets have not scaled down in the way devices have. In this work, we produce overlay tar…