Accelerated recrystallization of nanocrystalline films as a manifestation of the inner size effect of the diffusion coefficient

S. Petrushenko, S. Dukarov, M. Fijalkowski +1

This paper is devoted to studying the recrystallization of 100 nm thick polycrystalline films of copper and silver. It is found that in copper films deposited by the thermal evapor…