Variation of TiO2/SiO2 mixed layers induced by different Xe+ ion energies

Tran Van Phuc, Miroslaw Kulik, Afag Madadzada +4

The broadening and optical parameters of TiO2/SiO2 transition layers depending on the ion energy have been investigated using the Rutherford Backscattering Spectrometry (RBS) and E…