Ultralow-loss photonic integrated chips on 8-inch anomalous-dispersion Si${}_3$N${}_4$-SiO${}_2$-Si Wafer

Shuai Liu, Matthew W. Puckett, Jianfeng Wu +3

We report the fabrication of 8-inch crack-free, dispersion-engineered Si${}_3$N${}_4$-SiO${}_2$-Si wafers fully compatible with industrial foundry silicon photonics fabrication lines. By…