Thin n-in-p planar pixel sensors and active edge sensors for the ATLAS upgrade at HL-LHC

S. Terzo, A. Macchiolo, R. Nisius +1

Silicon pixel modules employing n-in-p planar sensors with an active thickness of 200 $\mu$m, produced at CiS, and 100-200 $\mu$m thin active/slim edge sensor devices, produced at VTT…