Effect of Annealing on Al Diffusion and its Impact on the Properties of Ga${}_2$O${}_3$ Thin Films Deposited on c-plane Sapphire by RF Sputtering

Ana Sofia Sousa, Duarte M. Esteves, Tiago T. Robalo +4

Gallium oxide is a wide-bandgap semiconductor which has been steadily growing in popularity due to its ultra-wide bandgap, suitability for harsh environments and distinctive opto-e…