Laser-microstructured ZnO/p-Si photodetector with enhanced and broadband responsivity across the UV-Vis-NIR

Georgios Chatzigiannakis, Angelina Jaros, Renaud Leturcq +4

We develop ZnO/p-Si photodetectors by atomic layer deposition (ALD) of ZnO thin films on laser-microstructured silicon and we investigate their electrical and optical behavior, dem…