Preliminary Synthesis of Carbon Nitride Thin Films by N${}_2$/CH${}_4$ Microwave Plasma Assisted Chemical Vapour Deposition: Characterisation of the Discharge and the Obtained Films

Paul Kouakou, Valerie Brien, Badreddine Assouar +4

The present work deals with the synthesis of crystalline carbon nitride thin films by microwave plasma assisted chemical vapour deposition in N${}_2$/CH${}_4$ gas mixture. The discharg…